
Prof. Fumio Koyama
Tokyo Institute of Technology, Japan
Title: New Function and Integration of VCSEL Photonics
Abstract:
A vertical cavity surface emitting laser (VCSEL) was invented in 1977. The 40 years’ research and
developments opened up various applications including datacom, sensors, optical interconnects, spectroscopy,
optical storages, printers, laser displays, laser radar, atomic clock and high power sources. A lot of unique
features have been already proven. A key challenge is to establish a platform to integrate functional devices with
VCSELs. While the vertical integration of coupled cavities and modulators with VCSELs were reported, there
are still challenges we need toward smart integration platforms involving various optical devices such as a
modulator, amplifier, switch, detector, beam scanner and so on.
In this paper, our recent activities on new functions and integration of VCSEL photonics will be reviewed. We
address a lateral integration platform and new functions, including high speed coupled cavity VCSELs, high power
VCSEL amplifiers, high-resolution beam scanners, and their integrations.
We proposed and demonstrated the lateral integration scheme for VCSEL photonics. A VCSEL structure
can be used as an optical waveguide in the lateral direction, which is called as a Bragg reflector waveguide. Slow
light can be excited in Bragg reflector waveguides with their large waveguide dispersion. The distributed Bragg
reflectors (DBR) used in VCSELs are composed of quarter-wavelength stack multi-layers. The slow down factor
is the ratio of the group velocity of slow light versus that in conventional semiconductor waveguides. When we
propagate light operating near the cutoff wavelength in the device, we are able to obtain a large slow down factor.
The low group velocity is caused by the large waveguide dispersion in a Bragg reflector waveguide. The low
group velocity dramatically reduces the size of various optical devices such as optical amplifiers, optical switches
and nonlinear optical devices. In addition, the large waveguide dispersion enables high-resolution beam steering.
The lateral integration platform enables us to form a transverse coupled cavity (TCC) VCSEL, which shows a
significant bandwidth extension thanks to “photon-photon resonances”. A record 3-dB bandwidth of over 30 GHz
was realized for 850 nm & 980 nm TCC VCSEL with a bow-tie shape or battledore-shape oxide aperture. The 3-
dB modulation bandwidth can be 3 times larger than a conventional VCSEL without optical feedback. In addition,
we demonstrate the lateral integration of an ultra-compact electro-absorption modulator. We obtained a sub-volt
low driving voltage, and the bandwidth beyond 30 GHz. Our ultra-compact modulator integrated VCSEL can boost
the modulation speed far beyond the direct modulation bandwidth with low-power consumption for use in nextgeneration computing and communication networks.
We also proposed a slow light VCSEL amplifier. It is similar to our reported beam scanner based on a Bragg
reflector waveguide structure. Its epitaxial structure is the same as oxide-confinement VCSELs. An input light is
coupled through a lensed fiber to a lateral propagation mode. A portion of the propagating light radiated from the
amplifier surface which forms a uniform wave fronts. The light decays exponentially due to radiation and
absorption loss, but its intensity becomes uniform along the VCSEL amplifier by injecting a current above the
lasing threshold of the VCSEL. In this case, power of the amplified light is proportional to the amplifier length,
and the beam divergence is getting smaller and smaller with increasing the length. We are able to obtain sharp
beam steering and high power simultaneously. The proposed device is easy to integrate with a VCSEL laterally,
and a slow light mode can be excited efficiently. Thus, we are able to form an ultra-compact, hig
Biography:
Fumio Koyama received the B.S., M.S., and Ph.D. degrees in physical electronics from the Tokyo Institute of
Technology, Tokyo, Japan, in 1980, 1982 and 1985, respectively. He is a professor, Institute of Innovative
Research, Tokyo Institute of Technology. He served as the dean, Institute of Innovative Research between 2018-
2020. His research interest includes VCSEL photonics, photonic integrated devices, 3D optical sensing and LiDAR.
He has authored or co-authored more than 1,000 journal and conference papers, including more than 100 invited
talks.
For more than 30 years, Fumio Koyama has been one of leading researchers whose work contributed to VCSEL
photonics and single-mode lasers for broadband optical communications. He received various awards, including the
IEEE Student Paper Award in 1985, the IEE Electronics Letters Premium in 1985 and in 1988, IEICE Paper Awards
in 1990, 2002, 2004 and 2007, Marubun Scientific Award in 1998, the Ichimura Award in 2004, the IEICE
Electronics Society Award in 2006, the MEXT Prize for Science and Technology in 2007, IEEE/LEOS William
Streifer Scientific Achievement Award in 2008, the 2012 Izuo Hayashi Award from the Japanese Society of Applied
Physics, Tokyo Metropolitan Government Award in 2015 and the Ichimura Prize in Industry for Excellent
Achievement from the New Technology Development Foundation in 2016, the 32nd Kenjiro Sakurai Memorial
Award from the Optoelectronics Industry and Technology Development Association in 2017, Okawa Award in 2018
and Nick Holonyak, Jr. Award from OSA in 2019 and IEICE Achievement Award in 2019. He is Fellow of IEEE,
OSA, IEICE and the Japan Society of Applied Physics.
He was a deputy editor for IEEE/OSA Journal of Lightwave Technology (2011-2016) and a topical editor for
OSA Optics Letters (2009-2013), and was the Guest Editor of IEEE JSTQE (2002 and 2007). He has served as
the IEEE David Sarnoff Award Committee Member (2009-2012) and the IEEE Fink and Baker Awards Committee
Member (2013-2014). He also has served as various committee members, including General Chair (2010), Program
Chair (2008) and Sub-committee Chair (2006) of IEEE International Semiconductor Laser Conferences, Subcommittee Co-Chair of ACP 2009-2010, Steering Committee Chair of CLEO Pacific-Rim (2012-), CLEO/QELS
TPC member (2006-2008), LEOS Annual Meeting TPC member (1998-2003), General Co-chair (2007) and
Program Co-chair (2005) OECC. He was the chair of IEEE Photonics Society Japan Chapter and Board Member of
IEEE Tokyo Section. He also served as President of Electronics Society, the Institute of Electronics, Information
and Communication Engineers (IEICE) (2011-2012) and the member of IEEE Photonics Society Board of
Governors (2012-2014)