Prof.  Huaiyu  Cui
Harbin Institute of Technology,  China

Title: The light-field modulation of extreme ultraviolet radiation by deformed photon sieves and its applications

Abstract:

Extreme ultraviolet (EUV) light presents unique properties and promising applications in fields such as lithography, high-resolution imaging, and light-matter interactions. Light field modulation, as a critical step in advancing light sources into practical applications, presents significant challenges and technical difficulties in the EUV band. This is primarily due to the severe absorption of EUV light by matter, which causes conventional light-modulation methods ineffective at this wavelength. In this presentation, we will report our recent work involving the modulation of EUV micro-nano light fields using diffractive optical elements, specifically photon sieves (PS). Using a 46.9 nm EUV laser pumped by capillary discharge developed by Harbin Institute of Technology, we have achieved various modulated EUV light-field including submicron 3D spatial focusing, array beam-splitting focusing, structured light field focusing, angular and radial splitting vortex focusing, et al. These advancements open new possibilities for EUV Application. With the modulated EUV light generated by photon sieves, tasks such as focal spot reconstruction and wavefront measurement have been achieved, demonstrating the significant application value of photon sieves in the EUV band. This greatly expands the potential applications and research opportunities for EUV light in high-resolution imaging, lithography, and other related fields.

Biography:

Huaiyu Cui(1988-) is an Associate Professor of Harbin Institute of Technology, advanced talents of Heilongjiang Province, council member of the Heilongjiang Society of Optics. Her research interests involves in applied research of extreme ultraviolet (EUV) radiations, especially in EUV micro/nano- optical field manipulation and EUV laser-matter interaction. In her recent published work, diverse EUV light field (such as vortex focusing beam, splitting focusing beam, structured focusing beam, et al) has been demonstrated using deformed photon sieves and EUV lasers was demonstrated to have the ability to induce self-formed nanostructures/nanoparticles. She Published over 20 peer-reviewed articles as first/corresponding author in leading journals such as PhotoniX, Optica, Nanophotonics, Scientific Reports, Optics Express, Applied Surface Science, Optics & Laser Technology, and Chinese Journal of Lasers, et al.