Associate Professor Hao Lu
Xidian University, China
Title: Recent Progress in Heterogenous Integration for Gallium Nitride-based Wide-bandgap Semiconductor
Abstract:
Multi-functional and high-speed communication systems, along with efficient power conversion, are increasingly in demand. Wide-bandgap semiconductor materials have attracted significant attention due to their superior power handling capabilities compared to conventional Si CMOS and III-V materials. Nevertheless, silicon remains the dominant platform owing to its low cost and established industrial manufacturing scale, making it highly desirable to integrate wide-bandgap devices onto silicon chips or wafers.
In this talk, we present recent advances in the heterogeneous integration of wide-bandgap semiconductor electronic devices. We will review key aspects including material growth, fabrication processes, interconnection technologies, and integration strategies employed in state-of-the-art technologies worldwide. Specifically, the presented wide-bandgap HEMTs, fabricated using a CMOS-compatible gold-free process, achieve ultra-low contact resistance, low on-resistance, and outstanding DC/RF performance. These promising results demonstrate that heterogeneous integration offers a compelling pathway toward low-cost, high-volume production for future B5G/6G communication and high-speed power conversion applications.
Biography:
Hao Lu is currently an associate professor at Xidian University, China. He received the Ph.D. degree in electrical engineering from Xidian University, Xi'an, China. He has been engaged in the research of GaN-based microwave/millimeter wave electronic devices and key technologies of heterogenous integration. He has published over 60 technical papers in IEEE Electron Devices Letters, IEEE Transactions on Electron Devices, Applied Physics Letters, IEDM, etc., and 33 chinese filed/pending patents. He has made several oral reports at international conferences such as IEEE WiPDA, IEEE ICTA, IWN, APWS, CSW etc. In 2021, he won the IEEE WiPDA-Asia Best Presentation Award, AMSE Best Presentation Award, and Xidian Excellent Doctoral Dissertation Funding. Dr. Lu is Member of IEEE, China Institute of Electronics (CIE), and Chinese Physical Society (CPS).
His specific research interests include the advanced fabrication, characterization, and heterogenous integration of wide band-gap semiconductor electronic devices.